The LIC 4100 V linear encoder for vacuum environments can operate down to 6*10-7 mbar, survive a 100 °C bake out and have low outgassing. The encoder system uses a glass scale that can be of a normal or zero thermal growth material attached to the equipment with a clamping system. The scanning unit has special design criteria, including vents to allow for quick pump downtimes, a cable with PTFE wire insulation and a tin-plated braid for shielding. The absolute resolution can be down to 1 nm. Several electrical interfaces are available, including EnDat 2.2, Fanuc, Mitsubishi and Panasonic serial interfaces.
