Keep It Clean
The LMS has no rollers or other mechanical drive elements to generate debris—eliminating a source of contaminants that could cause defects.Intevac
In the Gen II design, the disk carriers move independently at high speed and with high precision using the non-contact LMS, which uses inverted linear motors with coils embedded in the track and a magnetic plate embedded in each disk carrier. In the Gen I design, each chamber had a set of motor-controlled rollers that drove the carrier. But there was concern about the defects that were generated from the drive system, with the rollers inside the vacuum. Another issue was preventive maintenance time. "The alignment of drive mechanism is rather difficult," Liu says. "It takes skill and takes time." The Gen II system makes the wheels simple to align, and easy to maintain.
Particles generated inside the tool's vacuum chamber are a key concern in today's hard disk technology, which is less tolerant of those particles because of increased aerial density — the measure of storage bits that a hard disk manufacturer can squeeze into a piece of real estate. When IBM introduced the first hard disk in 1956, its aerial density was 2,000 bit/in.2. Today's PMR method is expected to be able to reach an aerial density of about 1 Tb/in.2.
A key aim of Intevac's machine redesign was to get the moving parts outside the vacuum. The system has 20 chambers, with elevators moving carriers and disks between chambers. "We used to have a ball screw type of drive inside the vacuum, which was heavily greased up," Liu says. "We had to shield it very good so it wouldn't generate defects. In Gen II, the ball screw is outside the vacuum, magnetically coupled to the drive inside the vacuum. We use that technology in quite a few places."