The upgraded ParallelPro leveling tool is designed for use in chemical vapor deposition (CVD) processes. Wireless communications and a field-serviceable battery pack offer flexibility. Designed initially for leveling in CVD processes but useful for process control in any equipment requiring precise parallelism, the tool measures offset distance, parallelism and temperature. Measurements are transmitted via Bluetooth to any tablet running a dedicated app, which also gives users the ability to save and analyze calibration data. The user-friendly graphic interface also allows users to customize display units and calibration parameters.