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High Sensitivity Accelerometers to Monitor Traffic and Railroad Vibration for Semiconductor Manufacturing

Oct. 14, 2024
This paper examines highly sensitive piezoelectric sensors for precise vibration measurement which is critical in semiconductor production to prevent quality and yield issues. The system detected a distant earthquake in real-time, alerting technicians before the media reported it.

This paper focuses on highly sensitive piezoelectric accelerometer sensors used to measure small vibrations. These sensors are crucial in vibration control for semiconductor and microchip production, as well as civil applications. The described system, designed for vibration control to improve microchip quality, also detected an earthquake in a distant country while monitoring took place in Taiwan. Remarkably, technicians received real-time data on the earthquake before international media reported it. The system’s high sensitivity highlights its effectiveness in both industrial and seismic monitoring applications.

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